Cleanroom Environment Particles
- Settling particles
- AMHS transport contamination
- Personnel activity contamination
- Equipment operation contamination
Grade 1 Clean Manufacturing Solutions, Control Micro-Contamination, Improve Yield
Funa Cleanliness is committed to providing manufacturing enterprises with a complete contamination control system covering environment, equipment, materials, and processes.
SOLUTION
Contamination Challenges in Semiconductor Manufacturing
Wafer Surface Contamination
- Metallic particles
- Non-metallic particles
- Organic contaminants
- Thin film residues
Equipment & Process Contamination
- Chamber shedding
- Pipeline particles
- Process residues
- Material outgassing
Consumable-Introduced Contamination
- Cleanroom wipes
- Gloves
- Packaging materials
- Chemicals
SOLUTION
Semiconductor Contamination Control Process
1
Environmental Monitoring
Cleanroom Particle Monitoring
Fastmicro
2
Particle Discovery
Particle Counting and Classification
Fastmicro
3
Particle analysis
Morphology and composition analysis
ParticleX / Phenom
4
Pollution source tracing
Pinpointing pollution sources
Coredux
5
Verification of Corrective Actions
Cleaning and Consumables Control
Texwipe
6
Continuous monitoring
Data Trends and Early Warnings
FastmicroSOLUTION
Solutions
Verification of Equipment Component Cleanliness After Cleaning
Using the PMC 2.0 particle measurement card, the Fastmicro Sample Scanner transforms the assessment of particle contamination on equipment components from a subjective "clean or not" judgment into quantifiable, verifiable data. The PMC enables surface sampling across flat and curved surfaces, cavities, rough textures, and hard-to-reach areas. Once the sample is processed by the scanner, it rapidly generates results—including particle count, size, and distribution—making it ideal for post-cleaning verification, pre-assembly release, incoming material inspection, supplier cleanliness benchmarking, and surface cleanliness validation in accordance with ISO 14644-9 and SEMI E195 standards.
Recommended Product Portfolio
Fastmicro Sample Scanner / PMC 2.0 Particle Measurement Card / Clean Transfer Box.
Typical output
Particle count, size, distribution, and inspection reports, as well as comparative results—before and after cleaning, between batches, and across suppliers.
Testing capabilities
Detects particles down to 0.5 μm (PSL-equivalent); 225 mm² sampling area; supports 90% collection efficiency, >90% repeatability, and KLARF/CSV output.
Application value
Incorporate particle inspection on the surfaces of complex components into a quantifiable and verifiable cleanliness validation process to reduce discrepancies arising from manual assessment.
Applicable Scope
Critical components of semiconductor equipment, post-cleaning assemblies, chamber parts, assembled units, and incoming supplier materials; covers scenarios including equipment, assemblies, components, and cleaning processes.
Sampling Advantages
PMC sampling is suitable for complex surfaces that are difficult to scan directly and minimizes interference with the body of high-value, precision components.
User Teams
Quality teams, cleaning engineers, assembly teams, and supply chain quality and application engineers.
Usage Stages
Post-cleaning verification, pre-assembly release, incoming material re-inspection, anomaly review, and supplier cleanliness comparison.
CORE PRODUCT
Core Products
Surface Particle Analysis System SAS
Fastmicro Sample Scanner
Surface cleanliness validation measurements in seconds
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Ambient Particle Fallout Scanner
Ambient Particle Fallout Scanner
Particle deposition rate monitoring for cleanrooms, critical workstations, and product exposure areas
View Product Details
High-Vacuum Particle Deposition Rate Monitor
High-Vacuum Particle Deposition Rate Monitor
Particle deposition rate monitoring for chamber interiors and vacuum environments
View Product Details
Wafer Surface Particle & Defect Inspection System
Wafer Surface Particle & Defect Inspection System
High-throughput direct surface particle and defect inspection for 4/6/8/12-inch wafers
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Automated SEM-EDS Particle Analysis System
ParticleX
Automated particle analysis platform for morphology observation, elemental composition analysis, and source identification
View Product DetailsCustomer Case
Customer Cases
ASML
Dr. Ir. L.H.A. Leunissen | ASML, Cleanliness Project Manager, stated: "As a long-term partner, Fastmicro's integrated applications have helped us meet equipment defect rate targets. The equipment is not only precise in measurement, but also easy to operate with high throughput. We highly recognize Fastmicro's professional services and look forward to further expanding equipment capabilities through deep collaboration in the future."
SERVICE
Services
The ParticleX system offers highly flexible customization services, ensuring that analysis processes, classification rules, and data reports can precisely match your specific requirements. At its core is a highly open software platform that allows you to tailor the system to your specific processes and application scenarios.
Custom Identification & Classification Rules
This is the core of system customization, allowing adjustment or creation of new analysis workflows based on requirements without relying on factory presets.
Custom Data Reports & Visualization
The system automatically converts complex data into clear, intuitive reports, with both content and format customizable.
One-Click Standardized Report Generation
The system deeply integrates industry standards, enabling one-click generation of standardized authoritative reports.
Personalized User Interface & Workflow
The system can be locked in fully automatic mode for daily quality inspection, or switched to manual electron microscopy mode for failure analysis, achieving multi-purpose use from a single machine.
STRATEGIC SUPPLIER
Strategic Suppliers
Empowering Extreme Manufacturing
Founded in Eindhoven, the Netherlands, in 2019, Fastmicro is an innovative company specializing in surface particle measurement technology. Dedicated to driving breakthroughs in contamination control through rapid, precise, and quantitative detection, the company has grown into a leading global provider of cleanliness management solutions, with products deployed across seven countries and utilized throughout the high-tech supply chain. By deeply understanding customer needs, Fastmicro continuously optimizes system performance, helping high-tech sectors—such as semiconductor manufacturing and precision engineering—meet rigorous cleanliness standards and elevating the overall quality of the industry value chain.
Contact Our Experts for a Tailored Solution
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