Fastmicro Sample Scanner

Surface Particle Analysis System SAS

Surface cleanliness validation measurements in seconds

The Fastmicro Sample Scanner measures surface particle contamination levels indirectly using samplers. These samplers benefit the user by enabling them to take particle contamination samples at any time on various products and assemblies.

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Surface Particle Analysis System SAS

Product Overview Typical Applications Customer Stories Product Parameters Download Center Related Products

PRODUCT OVERVIEW

Product Overview

Suitable for complex objects not easily loaded into large inspection systems — delivers standardized, traceable surface particle inspection results.

Applicable Targets

Semiconductor equipment parts
Post-cleaning components
Complex, rough, and curved surfaces
Assemblies and critical high-cleanliness components

Typical Applications

Cleaning validation
Pre-assembly contamination check
Supplier quality verification
Surface particle count, size, and position analysis

Technical Features

Digital particle contamination control
Sub-micron rapid particle detection
Patented light-scattering detection technology

Product Introduction

Combining sampling, pre-scanning, and result output workflow to rapidly complete surface particle verification and result review for complex surfaces.

Product Introduction

Combining sampling, pre-scanning, and result output workflow to rapidly complete surface particle verification and result review for complex surfaces.

Product Introduction

Combining sampling, pre-scanning, and result output workflow to rapidly complete surface particle verification and result review for complex surfaces.

Product Introduction

Combining sampling, pre-scanning, and result output workflow to rapidly complete surface particle verification and result review for complex surfaces.

Product Introduction

Combining sampling, pre-scanning, and result output workflow to rapidly complete surface particle verification and result review for complex surfaces.

Product Introduction

Combining sampling, pre-scanning, and result output workflow to rapidly complete surface particle verification and result review for complex surfaces.

TYPICAL APPLICATION

Typical Applications

Perform particle sampling on target surfaces

Perform particle sampling on target surfaces

Place sample into instrument for particle inspection and measurement

Place sample into instrument for particle inspection and measurement

View count, size, and position results in software

View count, size, and position results in software

Sample report: for quality assessment and results communication

Sample report: for quality assessment and results communication

Equipment component surface application scenario

Equipment component surface application scenario

CUSTOMER STORY

Customer Stories

Dr. Ir. L.H.A. Leunissen | ASML, cleanliness project manager remarked: "As a long-term partner, Fastmicro's integrated application has enabled us to meet equipment defect rate targets. The system not only delivers precise measurements but is also characterized by ease of operation and high throughput. We highly recognize Fastmicro's professional service and look forward to further expanding the system's functional boundaries through deeper collaboration."

PRODUCT PARAMETER

Product Parameters

General Specifications
Detection Threshold	0.5 µm PSL equivalent particles
Applicable Standard Scenarios	Surface cleanliness verification applications
Sample Area	225 mm²
Result Output	Particle count, size, and position
Accessories	Sampler / PMC Particle Measurement Card / Fixture

DOWNLOAD CENTER

Download Center

Surface Particle Analysis System SAS

Surface Particle Analysis System SAS

Surface particle analyzer for precise contamination monitoring on critical surfaces and components.

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