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Ambient Particle Fallout Scanner

Particle deposition rate monitoring for cleanrooms, critical workstations, and product exposure areas

The Fastmicro Particle Fallout Scanner has a compact,industrialized design and monitors particle depositionrates (DPRL) according to ISO 14644-9 and ISO 14644-17.

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Ambient Particle Fallout Scanner
Product Overview Typical Applications Customer Stories Product Parameters Download Center Related Products

PRODUCT OVERVIEW

Product Overview

Applicable Targets

  • Cleanroom critical workstations
  • Product exposure areas
  • Process windows
  • Transport and assembly areas

Typical Applications

  • Cleanroom validation
  • Critical surface deposition risk assessment
  • Contamination improvement closed-loop
  • Long-term monitoring of critical work areas

Technical Features

  • 2-inch field of view
  • Compact dimensions: 300 × 100 × 200 mm (L×W×H)
  • Includes Fastmicro eBox
  • Why measure particle deposition rate? Process validation on critical application surfaces is the core indicator for judging contamination control effectiveness.

Product Introduction

Through a continuous particle deposition rate monitoring process, we help customers extend environmental cleanliness management to the assessment of actual contamination risks on critical surfaces.

Product Introduction

Through a continuous particle deposition rate monitoring process, we help customers extend environmental cleanliness management to the assessment of actual contamination risks on critical surfaces.

Product Introduction

Through a continuous particle deposition rate monitoring process, we help customers extend environmental cleanliness management to the assessment of actual contamination risks on critical surfaces.

Product Introduction

Through a continuous particle deposition rate monitoring process, we help customers extend environmental cleanliness management to the assessment of actual contamination risks on critical surfaces.

TYPICAL APPLICATION

Typical Applications

Cleanroom and critical work area monitoring scenario

Cleanroom and critical work area monitoring scenario

Complementary to high-vacuum monitoring approach

Complementary to high-vacuum monitoring approach

CUSTOMER STORY

Customer Stories

Dr. Ir. L.H.A. Leunissen | ASML, cleanliness project manager remarked: "As a long-term partner, Fastmicro's integrated application has enabled us to meet equipment defect rate targets. The system not only delivers precise measurements but is also characterized by ease of operation and high throughput. We highly recognize Fastmicro's professional service and look forward to further expanding the system's functional boundaries through deeper collaboration."

PRODUCT PARAMETER

Product Parameters

General Specifications
Monitoring Target Critical surface particle deposition rate
Applicable Scenarios Cleanrooms, critical workstations, product exposure areas
Monitoring Direction Particle deposition rate monitoring
Product Positioning Real-Time Particle Fallout Monitor

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Related Products

Related Products

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