Surface Particle Analysis System SAS
Fastmicro Sample Scanner
Surface cleanliness validation measurements in seconds
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Product Series
Ambient Particle Fallout Scanner
Ambient Particle Fallout Scanner
Particle deposition rate monitoring for cleanrooms, critical workstations, and product exposure areas
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High-Vacuum Particle Deposition Rate Monitor
High-Vacuum Particle Deposition Rate Monitor
Particle deposition rate monitoring for chamber interiors and vacuum environments
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Wafer Surface Particle & Defect Inspection System
Wafer Surface Particle & Defect Inspection System
High-throughput direct surface particle and defect inspection for 4/6/8/12-inch wafers
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Automated SEM-EDS Particle Analysis System
ParticleX
Automated particle analysis platform for morphology observation, elemental composition analysis, and source identification
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