Applicable Targets
- Automotive component cleanliness inspection
- Battery material foreign material analysis
- Semiconductor contamination analysis
- Industrial quality control and failure analysis
OM-SEM-EDS
Correlative Particle Analysis Software System
OM-SEM-EDS correlative analysis solution for particle analysis
The Correlative Particle Analysis Software System is an integrated OM-SEM-EDS analysis platform developed for particle contamination analysis, cleanliness inspection, material failure analysis, and industrial quality control. The system links optical microscope particle data, real-time SEM imaging, particle identification assistance, EDS elemental analysis, data management, and report generation into a unified workflow.
PRODUCT OVERVIEW
Product Overview
By correlating optical microscope coordinates with SEM stage coordinates, the system rapidly transfers target particles selected in the optical microscope to SEM analysis positions, supporting SEM image acquisition, target confirmation, EDS spot or area analysis — drastically reducing manual searching, positioning, and repetitive documentation work.
Typical Applications
- Rapid optical particle screening
- Precise SEM/EDS positioning analysis
- Contamination particle source tracing
- Material failure cause analysis
Technical Features
- OM-SEM-EDS correlative analysis
- Automated optical particle positioning
- EDS spot/area/map analysis
- Data correlation management and report generation
PRODUCT PARAMETER
Product Parameters
| General Specifications | |
|---|---|
| Product Full Name | Correlative Particle Analysis Software System |
| English Name | Correlative Particle Analysis Software |
| Product Type | OM-SEM-EDS Correlative Analysis Software |
| Compatible Platform | Phenom SEM platform |
| Core Functions | OM data import, SEM positioning, image-assisted confirmation, EDS analysis, report generation |
| Optical Data | Supports particle ID, coordinates, size, area, perimeter, type, and other data management |
| Image Functions | OM image preview, SEM Live, Freeze, particle identification assistance, correlated image display |
| Coordinate Functions | Reference point calibration, OM coordinate transformation, Phenom stage coordinate mapping |
| Target Confirmation | Supports correlated viewing of OM images, SEM images, and particle information to assist user confirmation of target particles |
| EDS Modes | Spot analysis, Region analysis, Map analysis |
| Quantitative Results | Element identification, mass ratio, atomic ratio |
| Data Export | SEM images, MSA spectra, PNG spectra, JSON, CSV, DOCX reports |
| Typical Applications | Cleanliness inspection, particle contamination analysis, material re-inspection, failure analysis, quality control |
DOWNLOAD CENTER
Download Center
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